Study of Si/SiO2 hybrid antireflective coatings on SLD prepared by DSEBET - art. no. 69842P

SEMI OpenIR > 中国科学院半导体研究所（2009年前）

	Study of Si/SiO2 hybrid antireflective coatings on SLD prepared by DSEBET - art. no. 69842P
	Sun, MX; Tan, MQ; Zhao, M; Sun, MX, Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China.
	2008
会议名称	6th International Conference on Thin Film Physics and Applications
会议录名称	THIN FILM PHYSICS AND APPLICATIONS,SIXTH INTERNATIONAL CONFERENCE
页码	6984: P9842-P9842
会议日期	SEP 25-28, 2007
会议地点	Shanghai, PEOPLES R CHINA
出版地	1000 20TH ST, PO BOX 10, BELLINGHAM, WA 98227-0010 USA
出版者	SPIE-INT SOC OPTICAL ENGINEERING
ISSN	0277-786X
ISBN	978-0-8194-7182-6
部门归属	[sun, m. x.; tan, m. q.; zhao, m.] chinese acad sci, inst semicond, state key lab integrated optoelect, beijing 100083, peoples r china
摘要	We introduce a double source electron beam evaporation (DSEBET) technique in this paper. The refractive index coatings were fabricated on K9 glass substrate by adjusting the evaporation rates of two independent sources. The coatings, which were described by atomic force microscopy (AFM), show good compactness and homogeneity. The antireflective (AR) coatings were fabricated on Superluminescent Diodes (SLD) by DSEBET. The hybrid AR coatings on the facets of SLD were prepared in evaporation rates of 0.22nm/s and 0.75nm/s for silicon and silicon dioxide, respectively. The results of AFM and spectral performance of coated SLD show that DSEBET has a promising future in preparing the coatings on optoelectronic devices.
关键词	Antireflective Coatings Superluminescent Diodes Double Source Electron Beam Evaporation Technology
学科领域	光电子学
主办者	Shanghai Jiao Tong Univ, Dept Phys.; Natl Nat Sci Fdn China.; Chinese Phys Soc.; Shanghai Phys Soc.; SPIE.
收录类别	CPCI-S
语种	英语
文献类型	会议论文
条目标识符	http://ir.semi.ac.cn/handle/172111/7786
专题	中国科学院半导体研究所（2009年前）
通讯作者	Sun, MX, Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China.
推荐引用方式 GB/T 7714	Sun, MX,Tan, MQ,Zhao, M,et al. Study of Si/SiO2 hybrid antireflective coatings on SLD prepared by DSEBET - art. no. 69842P[C]. 1000 20TH ST, PO BOX 10, BELLINGHAM, WA 98227-0010 USA:SPIE-INT SOC OPTICAL ENGINEERING,2008:6984: P9842-P9842.

条目包含的文件
文件名称/大小	文献类型	版本类型	开放类型	使用许可
672.pdf（326KB）			限制开放	--	请求全文