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Study of Si/SiO2 hybrid antireflective coatings on SLD prepared by DSEBET - art. no. 69842P 会议论文
THIN FILM PHYSICS AND APPLICATIONS,SIXTH INTERNATIONAL CONFERENCE, Shanghai, PEOPLES R CHINA, SEP 25-28, 2007
作者:  Sun, MX;  Tan, MQ;  Zhao, M;  Sun, MX, Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China.
Adobe PDF(326Kb)  |  收藏  |  浏览/下载：1599/436  |  提交时间：2010/03/09
Antireflective Coatings  Superluminescent Diodes  Double Source Electron Beam Evaporation Technology