中文版 | English

在结果中检索

SEMI OpenIR

浏览/检索结果: 共1条，第1-1条 帮助

已选(0)清除 条数/页：   排序方式：
A silicon capacitive microphone based on oxidized porous silicon sacrificial technology 会议论文
2004 7TH INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED CIRCUITS TECHNOLOGY, Beijing, PEOPLES R CHINA, OCT 18-21, 2004
作者:  Ning, J;  Liu, ZL;  Liu, HZ;  Ge, YC;  Ning, J, Chinese Acad Sci, Microelect R&D Ctr, Inst Semicond, Beijing 100083, Peoples R China.
Adobe PDF(151Kb)  |  收藏  |  浏览/下载：1219/186  |  提交时间：2010/03/29
Silicon Capacitive Microphone  Oxidized Porous Silicon  Sacrificial Layer