A SIMPLE METHOD FOR EFFECTIVELY RESTRAIN ELECTROCHEMICAL CORROSION OF POLYCRYSTALLINE SILICON BY HF-BASED SOLUTIONS

	A SIMPLE METHOD FOR EFFECTIVELY RESTRAIN ELECTROCHEMICAL CORROSION OF POLYCRYSTALLINE SILICON BY HF-BASED SOLUTIONS
	Xie J (Xie J.); Liu YF (Liu Y. F.); Zhang ML (Zhang M. L.); Yang JL (Yang J. L.); Yang FH (Yang F. H.)
	2011
会议名称	24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
会议录名称	PROCEEDINGS: IEEE MICRO ELECTRO MECHANICAL SYSTEMS 页: 205-208
会议日期	2011
会议地点	Cancun, MEXICO
学科领域	微电子学
收录类别	CPCI（ISTP）
语种	英语
文献类型	会议论文
条目标识符	http://ir.semi.ac.cn/handle/172111/22640
专题	半导体集成技术工程研究中心
推荐引用方式 GB/T 7714	Xie J ,Liu YF ,Zhang ML ,et al. A SIMPLE METHOD FOR EFFECTIVELY RESTRAIN ELECTROCHEMICAL CORROSION OF POLYCRYSTALLINE SILICON BY HF-BASED SOLUTIONS[C],2011.