Gas source molecular beam epitaxy and thermal stability of Si1-xGex/Si superlattice materials

SEMI OpenIR > 中国科学院半导体研究所（2009年前）

	Gas source molecular beam epitaxy and thermal stability of Si1-xGex/Si superlattice materials
	Zou LF; Acosta-Ortiz SE; Zou LX; Regalado LE; Sun DZ; Wang ZG; Zou LF Ctr Invest Opt AC Unidad Aguascalientes Juan Montoro 207Zona Ctr Aguascalientes 20000 Ags Mexico. 电子邮箱地址: [email protected]
	1998
会议名称	14th Latin American Symposiumm on Solid State Physics
会议录名称	REVISTA MEXICANA DE FISICA, 44
页码	93-96
会议日期	JAN 11-16, 1998
会议地点	OAXACA, MEXICO
出版地	APARTADO POSTAL 70-348, COYOACAN 04511, MEXICO
出版者	SOCIEDAD MEXICANA DE FISICA
ISSN	0035-001X
部门归属	ctr invest opt ac, unidad aguascalientes, aguascalientes 20000, ags, mexico; zhongnan univ natl wuhan, dept comp sci, wuhan 430074, peoples r china; ctr invest opt, leon 37000, gto, mexico; chinese acad sci, inst semicond, beijing 100083, peoples r china
摘要	Gas source molecular beam epitaxy has been used to grow Si1-xGex alloys and Si1-xGex/Si multi-quantum wells (MQWs) on (100) Si substrates with Si2H6 and GeH4 as sources. Heterostructures and MQWs with mirror-like surface morphology, good crystalline qualify, and abrupt interfaces have been studied by a variety of in situ and ex situ techniques. The structural stability and strain relaxation in Si1-xGex/Si heterostructures have been investigated, and compared to that in the As ion-implanted Si1-xGex epilayers. The results show that the strain relaxation mechanism of the non-implanted Si1-xGex epilayers is different from that of the As ion-implanted Si1-xGex epilayers.
关键词	Strain Relaxation Heterostructures
学科领域	半导体物理
收录类别	CPCI-S
语种	英语
文献类型	会议论文
条目标识符	http://ir.semi.ac.cn/handle/172111/15057
专题	中国科学院半导体研究所（2009年前）
通讯作者	Zou LF Ctr Invest Opt AC Unidad Aguascalientes Juan Montoro 207Zona Ctr Aguascalientes 20000 Ags Mexico. 电子邮箱地址: [email protected]
推荐引用方式 GB/T 7714	Zou LF,Acosta-Ortiz SE,Zou LX,et al. Gas source molecular beam epitaxy and thermal stability of Si1-xGex/Si superlattice materials[C]. APARTADO POSTAL 70-348, COYOACAN 04511, MEXICO:SOCIEDAD MEXICANA DE FISICA,1998:93-96.

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